显示 1 - 10 条结果,共 11 条结果。
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HtB-Octane
Hafnium Tetiary Butoxide-Octane(HtB-Octane) is a liquid source material for HfO2 gate dielectric.
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TDMAZr
TDMAZr is typically used for zirconium oxide ALD or PE-ALD depositions.
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TDMAHf
Tetrakis dimethylamido hafnium(TDMATHf) is a liquid source material for ALD or MOCVD of high-k gate dielectirc deposition.
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TAETO
TAETO is mainly used for CVD or ALD tantalum(V) oxide thin-film depositions.
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ZrCl4
ZrCl4 is r solid ALD precursor for high-k material Zirconium Oxide (ZrO2) deposition.
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HfCl4 ─ Hafnium tetrachloride
Hafnium tetrachloride (HfCl4) is a solid source material for the atomic layer Thin Film Deposition (ALD) of hafnium oxide films.
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TDEAZr
TDEAZr is typically used for zirconium oxide ALD or PE-ALD depositions.
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TMA
TMA is the most widely used aluminum precursor for MOVPE, CVD, or ALD processes for Si semiconductor, LED, III-V solar, Laser diode and other compound semiconductor devices.
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TBTDET
TBTDET is a liquid precursor for CVD or ALD tantalum oxide and tantalum nitride thin films depositions.
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TEMATi
TEMATi is a liquid chemical source for CVD titanium nitride film depositions.
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