显示 1 - 3 条结果,共 3 条结果。
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Copper Bulk CMP slurries: Cu Low dishing CMP, Cu High Rate CMP
Our Copper Bulk CMP products are tunable Slurries designed to meet performance requirements for removal rate, topography and defectivity.
Advanced PackagingBEOL InterconnectChinaEuropeJapanKoreaTaiwanLogicSensors (MEMS, Optoelectronics)COPPEREADY®Copper -
Post CMP Cleans
Our post CMP Clean products are formulated clean chemistry product normally used in brush box unit after CMP polishing step.
Advanced PackagingBEOL InterconnectMOL MG & ContactsChinaEuropeJapanKoreaTaiwanLogicSensors (MEMS, Optoelectronics)COPPEREADY® -
Copper Barrier CMP slurries: BAR Tunable barrier CMP
Our Copper Barrier CMP products are tunable Slurries designed to meet performance requirements for removal rate with Copper, Liners and dielectric e.g. Low K rate tunability.
Advanced PackagingBEOL InterconnectChinaEuropeJapanKoreaTaiwanLogicSensors (MEMS, Optoelectronics)DA Nano®