Pentakis(dimethylamino) tantalum, PDMAT is a soild tantalum precursor for TaN barrier layers to prevent copper diffusion in semiconductor application.
Category:
- Deposition - Metal Hardmask
- Metal Hardmasks
- Metal Nitrides
- Metals
Locations:
- China
- Europe
- Japan
- Korea
- Taiwan
Industry:
- Logic
- Semiconductors