Tetrakis dimethylamido hafnium(TDMATHf) is a liquid source material for ALD or MOCVD of high-k gate dielectirc deposition.
- High-k
- Metal Oxides
- China
- Europe
- Japan
- Korea
- Taiwan
- Logic
- Semiconductors
Tetrakis dimethylamido hafnium(TDMATHf) is a liquid source material for ALD or MOCVD of high-k gate dielectirc deposition.
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