Tetrakis(ethylmethylamido)hafnium(TEMAHf) is a liquid source material for ALD of the high-k gate rielectric such as HfO2 and HfxNy.
Category:
- Deposition - Metal Hardmask
- Metal Hardmasks
- Metal Nitrides
Locations:
- China
- Europe
- Japan
- Korea
- Taiwan
Industry:
- Logic
- Semiconductors