Our CHEMGUARD® 1000 and 2000 models are single tank liquid refill systems (STLRs) designed to work with quartz host ampoules and Source Controller Modules (SCMs) to provide 100% tool uptime.
Category:
- Chamber Cleaning
- Chemical Delivery Systems
Locations:
- China
- Europe
- Japan
- Korea
- Taiwan
Industry:
- Display
- Electronic
- Equipment
- Industrial
- Logic
- Sensors (MEMS, Optoelectronics)