ION-X® PH3 ─ Phosphine ION-X® Dopant Gas Storage and Delivery System

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Phosphine (PH3) ION-X® dopant gas storage and delivery system available for our worldwide customers.

Category:
  • Phosphorus Dopants
Locations:
  • China
  • Europe
  • Japan
  • Korea
  • Taiwan
Industry:
  • Semiconductors
Brands:
  • ION-X®

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Product info

Description

Phosphine (PH3) ION-X® dopant gas storage and delivery system available for our worldwide customers. ION-X® is used for the safe storage and delivery of sub-atmospheric dopant gases such as arsine, phosphine and boron trifluoride. With its Metal-Organic Framework (MOF), ION-X® can selectively adsorb, store and safely deliver ultra-high purity gases at sub-atmospheric pressures.

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