Trimethylborate (TMB) is used as a liquid boron dopant in the Thin Film Deposition of Borosilicate (BSG) and Borophosphosilicate (BPSG) glasses to reduce the reflow temperatures of the deposited glass.
Category:
- Boron Dopants
- Deposition
- Doping
- Metals
Locations:
- China
- Europe
- Japan
- Korea
- Taiwan
Industry:
- Logic
- Semiconductors