Tetrakis dimethylamido hafnium(TDMATHf) is a liquid source material for ALD or MOCVD of high-k gate dielectirc deposition.
Category:
- High-k
- Metal Oxides
Locations:
- US
- Korea
- China
- Taiwan
- Japan
- Europe
Industry:
- Semiconductors
- Logic
- Memory (DRAM, NAND, 3D NAND)