CHEMGUARD^® 1000-2000 Automated Chemical Refill Systems

Our CHEMGUARD^® 1000 and 2000 models are single tank liquid refill systems (STLRs) designed to work with quartz host ampoules and Source Controller Modules (SCMs) to provide 100% tool uptime. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-efficient manner.

CHEMGUARD^® 1000 and 2000 models have a reduced footprint allowing for multiple cabinet placement adjacent to each other. This maximizes the use of your available floor space within the cleanroom or sub-fab while reducing exhaust requirements for a lower cost of ownership. Each cabinet is fully automated and includes our newest 3rd generation, microprocessor-based controller with color touch screen. The controller optimizes container change operations with automated monitoring to ensure removal of all chemical traces from pigtail connections. Standardized, modular design allows for customization, ease of maintenance and future expansion. Each CHEMGUARD^® model is backed with testing and years of experience to ensure reliable chemical delivery to the tool.

The CHEMGUARD^® family of high purity chemical delivery equipment is more than just a standalone piece of equipment in your fab. It is designed to interface directly to most OEM process tools and can be supplemented with fabwide distribution systems designed for ultra high purity liquids.