We have a long history as the world's leading provider of AIROPAK® fluorine gas mixtures for surface modification of plastics and fluoropolymers.
- Etching
- Dielectrics
- Spacer Patterning
- Edge Bead Remover (EBR)
- US
- Korea
- China
- Taiwan
- Japan
- Europe
- Logic
- Memory (DRAM, NAND, 3D NAND)
- Sensors (MEMS, Optoelectronics)
- Industrial
- Electronic