Tetramethylsilane (4MS) is a precursor for depositing carbon doped silicon films and silicon carbide-like films.
Category:
- Dielectrics
- Low-k Dielectrics
Locations:
- US
- Korea
- China
- Taiwan
- Japan
- Europe
Industry:
- Semiconductors
- Logic
- Memory (DRAM, NAND, 3D NAND)