Hexafluorobutadine (Hexafluoro-1,3-butadiene) C4F6 is used for dielectric etch applications. Hexafluoro-1,3-butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas.
Category:
- Etching
Locations:
- China
- Europe
- Japan
- Korea
- Taiwan
Industry:
- Logic