Trimethylphosphate (TMPO) is a liquid phosphorus source used in depositing PSG & BPSG films for semiconductor applications. TMPO is a high purity liquid precursor used in producing high quality dielectric films
Category:
- Deposition
- Doping
- Phosphorus Dopants
Locations:
- China
- Europe
- Japan
- Korea
- Taiwan
Industry:
- Logic
- Semiconductors