CHEMGUARD® GENIII 500 Automated Chemical Refill System with Solvent Purge

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Our CHEMGUARD® Gen III 500 is a dual-reservoir (DTLR) system with automated solvent purge for low volatility chemicals.

Category:
  • Chemical Delivery Systems
Locations:
  • China
  • Europe
  • Japan
  • Korea
  • Taiwan
Industry:
  • Display
  • Electronic
  • Equipment
  • Industrial
  • Logic
  • Sensors (MEMS, Optoelectronics)

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Product info

Description

Our CHEMGUARD® Gen III 500 is a dual-reservoir (DTLR) system with automated solvent purge for low volatility chemicals. Dual precursor tanks allow for 100% uptime to meet the needs of today's manufacturing fabs. Years of experience goes into all of our high purity chemical delivery equipment, ensuring delivery of ultra high purity (UHP) liquids in a safe and cost-efficient manner.

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